Large-scale membrane transfer process: Its application to single-crystal-silicon continuous membrane deformable mirror

T. Wu, T. Sasaki, M. Akiyama, K. Hane

Research output: Contribution to journal › Article › peer-review

Original language	Undefined/Unknown
Journal	Journal of Micromechanics and Microengineering
DOIs	https://doi.org/10.1088/0960-1317/23/12/125003
Publication status	Published - 2013

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TY - JOUR

T1 - Large-scale membrane transfer process: Its application to single-crystal-silicon continuous membrane deformable mirror

AU - Wu, T.

AU - Sasaki, T.

AU - Akiyama, M.

AU - Hane, K.

PY - 2013

Y1 - 2013

UR - http://www.scopus.com/inward/record.url?eid=2-s2.0-84888870778&partnerID=MN8TOARS

U2 - 10.1088/0960-1317/23/12/125003

DO - 10.1088/0960-1317/23/12/125003

M3 - Artikel

SN - 1361-6439

JO - Journal of Micromechanics and Microengineering

JF - Journal of Micromechanics and Microengineering

ER -