Large-amplitude resonant varifocal mirror with an acoustic cavity

T. Sasaki, L. Rayas, K. Nakazawa, K. Hane

    Research output: Conference proceeding/Chapter in Book/Report/Conference Paper

    Original languageUndefined/Unknown
    Title of host publication2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015
    DOIs
    Publication statusPublished - 2015

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