Is AlN/Sapphire bilayer structure an alternative to langasite for ultra-high-temperature SAW applications?

Thierry Aubert; Omar Elmazria; Jochen Bardong; Gudrun Bruckner; Badreddine Assouar

doi:10.1109/ULTSYM.2011.0516

Is AlN/Sapphire bilayer structure an alternative to langasite for ultra-high-temperature SAW applications?

Thierry Aubert, Omar Elmazria, Jochen Bardong, Gudrun Bruckner, Badreddine Assouar

Research output: Conference proceeding/Chapter in Book/Report/ › Conference Paper › peer-review

Abstract

This paper explores the potentiality to use AlN/sapphire structure as alternative piezoelectric material to langasite (LGS) for high-temperature SAW applications. In situ SAW measurements performed in vacuum up to 1050°C attest that AlN/Sapphire is more stable than LGS in such conditions. While in the case of LGS, the signal is completely lost after 8 hours at 1050°C, the device based on AlN/sapphire stays alive for 60 hours at this extreme temperature. Moreover, the degradation is attributed not to AlN but to the agglomeration phenomena undergone by the Iridium IDTs. The AlN/Sapphire structure shows also, between room temperature and at least 1050°C, a great sensitivity to temperature as well as a good linearity, which is very suitable for temperature sensor applications.

Original language	English
Title of host publication	2011 IEEE International Ultrasonics Symposium
Pages	2082-2085
Number of pages	4
DOIs	https://doi.org/10.1109/ULTSYM.2011.0516
Publication status	Published - 21 Oct 2011
Externally published	Yes
Event	2011 IEEE International Ultrasonics Symposium - Orlando, FL, USA Duration: 18 Oct 2011 → 21 Oct 2011

Conference

Conference	2011 IEEE International Ultrasonics Symposium
Period	18/10/11 → 21/10/11

Keywords

Temperature sensors
Surface acoustic wave devices
Surface acoustic waves
Substrates
Films
Temperature measurement
Delay lines

Access to Document

10.1109/ULTSYM.2011.0516

https://ieeexplore.ieee.org/stamp/stamp.jsp?tp=&arnumber=6293309

Cite this

@inproceedings{e8ba71ff2bf94bfd9a734c2ac08c4898,

title = "Is AlN/Sapphire bilayer structure an alternative to langasite for ultra-high-temperature SAW applications?",

abstract = "This paper explores the potentiality to use AlN/sapphire structure as alternative piezoelectric material to langasite (LGS) for high-temperature SAW applications. In situ SAW measurements performed in vacuum up to 1050°C attest that AlN/Sapphire is more stable than LGS in such conditions. While in the case of LGS, the signal is completely lost after 8 hours at 1050°C, the device based on AlN/sapphire stays alive for 60 hours at this extreme temperature. Moreover, the degradation is attributed not to AlN but to the agglomeration phenomena undergone by the Iridium IDTs. The AlN/Sapphire structure shows also, between room temperature and at least 1050°C, a great sensitivity to temperature as well as a good linearity, which is very suitable for temperature sensor applications.",

keywords = "Temperature sensors, Surface acoustic wave devices, Surface acoustic waves, Substrates, Films, Temperature measurement, Delay lines",

author = "Thierry Aubert and Omar Elmazria and Jochen Bardong and Gudrun Bruckner and Badreddine Assouar",

year = "2011",

month = oct,

day = "21",

doi = "10.1109/ULTSYM.2011.0516",

language = "English",

isbn = "978-1-4577-1251-7",

pages = "2082--2085",

booktitle = "2011 IEEE International Ultrasonics Symposium",

note = "2011 IEEE International Ultrasonics Symposium ; Conference date: 18-10-2011 Through 21-10-2011",