Iridium interdigital transducers for high-temperature surface acoustic wave applications

Thierry Aubert; Jochen Bardong; Omar Elmazria; Gudrun Bruckner; Badreddine Assouar

doi:10.1109/TUFFC.2012.2178

Iridium interdigital transducers for high-temperature surface acoustic wave applications

Thierry Aubert, Jochen Bardong, Omar Elmazria, Gudrun Bruckner, Badreddine Assouar

Research output: Contribution to journal › Article › peer-review

Abstract

Iridium is investigated as a potential metal for interdigital transducers (IDTs) in SAW devices operating at high temperatures. SAW delay lines based on such IDTs and langasite (LGS) substrate are fabricated and electrically characterized. The results show reliable frequency responses up to 1000°C. The strong increase of insertion losses beyond this temperature, leading to the vanishing of the signal between 1140 and 1200°C, is attributed to surface transformation of the LGS crystal, consisting of relevant gallium and oxygen losses, as evidenced by scanning electron microscopy, energy-dispersive X-ray spectroscopy, and secondary ion mass spectroscopy.

Original language	English
Article number	6156820
Pages (from-to)	194-197
Number of pages	4
Journal	IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control
Volume	59
Issue number	2
DOIs	https://doi.org/10.1109/TUFFC.2012.2178
Publication status	Published - 1 Feb 2012
Externally published	Yes

Keywords

Surface acoustic wave devices
Crystals
Temperature sensors
Gallium
Temperature measurement
Substrates

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10.1109/TUFFC.2012.2178

https://ieeexplore.ieee.org/stamp/stamp.jsp?tp=&arnumber=6156820

Cite this

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title = "Iridium interdigital transducers for high-temperature surface acoustic wave applications",

abstract = "Iridium is investigated as a potential metal for interdigital transducers (IDTs) in SAW devices operating at high temperatures. SAW delay lines based on such IDTs and langasite (LGS) substrate are fabricated and electrically characterized. The results show reliable frequency responses up to 1000°C. The strong increase of insertion losses beyond this temperature, leading to the vanishing of the signal between 1140 and 1200°C, is attributed to surface transformation of the LGS crystal, consisting of relevant gallium and oxygen losses, as evidenced by scanning electron microscopy, energy-dispersive X-ray spectroscopy, and secondary ion mass spectroscopy.",

keywords = "Surface acoustic wave devices, Crystals, Temperature sensors, Gallium, Temperature measurement, Substrates",

author = "Thierry Aubert and Jochen Bardong and Omar Elmazria and Gudrun Bruckner and Badreddine Assouar",

year = "2012",

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AU - Aubert, Thierry

AU - Bardong, Jochen

AU - Elmazria, Omar

AU - Bruckner, Gudrun

AU - Assouar, Badreddine

PY - 2012/2/1

Y1 - 2012/2/1

N2 - Iridium is investigated as a potential metal for interdigital transducers (IDTs) in SAW devices operating at high temperatures. SAW delay lines based on such IDTs and langasite (LGS) substrate are fabricated and electrically characterized. The results show reliable frequency responses up to 1000°C. The strong increase of insertion losses beyond this temperature, leading to the vanishing of the signal between 1140 and 1200°C, is attributed to surface transformation of the LGS crystal, consisting of relevant gallium and oxygen losses, as evidenced by scanning electron microscopy, energy-dispersive X-ray spectroscopy, and secondary ion mass spectroscopy.

AB - Iridium is investigated as a potential metal for interdigital transducers (IDTs) in SAW devices operating at high temperatures. SAW delay lines based on such IDTs and langasite (LGS) substrate are fabricated and electrically characterized. The results show reliable frequency responses up to 1000°C. The strong increase of insertion losses beyond this temperature, leading to the vanishing of the signal between 1140 and 1200°C, is attributed to surface transformation of the LGS crystal, consisting of relevant gallium and oxygen losses, as evidenced by scanning electron microscopy, energy-dispersive X-ray spectroscopy, and secondary ion mass spectroscopy.

KW - Surface acoustic wave devices

KW - Crystals

KW - Temperature sensors

KW - Gallium

KW - Temperature measurement

KW - Substrates

UR - https://ieeexplore.ieee.org/document/6156820/

U2 - 10.1109/TUFFC.2012.2178

DO - 10.1109/TUFFC.2012.2178

M3 - Article

SN - 1525-8955

VL - 59

SP - 194

EP - 197

JO - IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control

JF - IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control

IS - 2

M1 - 6156820

ER -

Iridium interdigital transducers for high-temperature surface acoustic wave applications

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Keywords

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