TY - JOUR
T1 - Iridium interdigital transducers for high-temperature surface acoustic wave applications
AU - Aubert, Thierry
AU - Bardong, Jochen
AU - Elmazria, Omar
AU - Bruckner, Gudrun
AU - Assouar, Badreddine
PY - 2012/2/1
Y1 - 2012/2/1
N2 - Iridium is investigated as a potential metal for interdigital transducers (IDTs) in SAW devices operating at high temperatures. SAW delay lines based on such IDTs and langasite (LGS) substrate are fabricated and electrically characterized. The results show reliable frequency responses up to 1000°C. The strong increase of insertion losses beyond this temperature, leading to the vanishing of the signal between 1140 and 1200°C, is attributed to surface transformation of the LGS crystal, consisting of relevant gallium and oxygen losses, as evidenced by scanning electron microscopy, energy-dispersive X-ray spectroscopy, and secondary ion mass spectroscopy.
AB - Iridium is investigated as a potential metal for interdigital transducers (IDTs) in SAW devices operating at high temperatures. SAW delay lines based on such IDTs and langasite (LGS) substrate are fabricated and electrically characterized. The results show reliable frequency responses up to 1000°C. The strong increase of insertion losses beyond this temperature, leading to the vanishing of the signal between 1140 and 1200°C, is attributed to surface transformation of the LGS crystal, consisting of relevant gallium and oxygen losses, as evidenced by scanning electron microscopy, energy-dispersive X-ray spectroscopy, and secondary ion mass spectroscopy.
KW - Surface acoustic wave devices
KW - Crystals
KW - Temperature sensors
KW - Gallium
KW - Temperature measurement
KW - Substrates
UR - https://ieeexplore.ieee.org/document/6156820/
U2 - 10.1109/TUFFC.2012.2178
DO - 10.1109/TUFFC.2012.2178
M3 - Article
SN - 1525-8955
VL - 59
SP - 194
EP - 197
JO - IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control
JF - IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control
IS - 2
M1 - 6156820
ER -