Integrated tracking and focusing micro lens actuators based on silicon bulk micromachining

P. Li, T. Sasaki, L.F. Pan, K. Hane

Research output: Conference proceeding/Chapter in Book/Report/ › Conference Paper

Original language	Undefined/Unknown
Title of host publication	2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11
DOIs	https://doi.org/10.1109/TRANSDUCERS.2011.5969734
Publication status	Published - 2011

Access to Document

@inproceedings{42c338579ea345668fdecf82e770ae8d,

title = "Integrated tracking and focusing micro lens actuators based on silicon bulk micromachining",

author = "P. Li and T. Sasaki and L.F. Pan and K. Hane",

year = "2011",

doi = "10.1109/TRANSDUCERS.2011.5969734",

language = "undefiniert/unbekannt",

booktitle = "2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11",

}

TY - GEN

T1 - Integrated tracking and focusing micro lens actuators based on silicon bulk micromachining

AU - Li, P.

AU - Sasaki, T.

AU - Pan, L.F.

AU - Hane, K.

PY - 2011

Y1 - 2011

UR - http://www.scopus.com/inward/record.url?eid=2-s2.0-80052119428&partnerID=MN8TOARS

U2 - 10.1109/TRANSDUCERS.2011.5969734

DO - 10.1109/TRANSDUCERS.2011.5969734

M3 - Konferenzartikel

BT - 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11

ER -