Integrated tracking and focusing micro lens actuators based on silicon bulk micromachining

P. Li, T. Sasaki, L.F. Pan, K. Hane

Publikation: Konferenzband/Beitrag in Buch/Bericht › Konferenzartikel

Originalsprache	undefiniert/unbekannt
Titel	2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11
DOIs	https://doi.org/10.1109/TRANSDUCERS.2011.5969734
Publikationsstatus	Veröffentlicht - 2011

Zugriff auf Dokument

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title = "Integrated tracking and focusing micro lens actuators based on silicon bulk micromachining",

author = "P. Li and T. Sasaki and L.F. Pan and K. Hane",

year = "2011",

doi = "10.1109/TRANSDUCERS.2011.5969734",

language = "undefiniert/unbekannt",

booktitle = "2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11",

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TY - GEN

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AU - Li, P.

AU - Sasaki, T.

AU - Pan, L.F.

AU - Hane, K.

PY - 2011

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U2 - 10.1109/TRANSDUCERS.2011.5969734

DO - 10.1109/TRANSDUCERS.2011.5969734

M3 - Konferenzartikel

BT - 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11

ER -