Influence of Substrate Temperature on Structural, Optical, and Electrical Properties of ZnO Deposited by Plasma-EnhancedAtomic Layer Deposition

Julian Pilz

Influence of Substrate Temperature on Structural, Optical, and Electrical Properties of ZnO Deposited by Plasma-EnhancedAtomic Layer Deposition

Research output: Contribution to conference (No Proceedings) › Abstract › peer-review

Original language	American English
Publication status	Published - Sept 2018
Externally published	Yes
Event	68th Annual Meeting of the Austrian Physical Society - Graz Duration: 11 Sept 2018 → 14 Sept 2018

Conference

Conference	68th Annual Meeting of the Austrian Physical Society
City	Graz
Period	11/09/18 → 14/09/18

Cite this

@conference{794c0c5f67df49a586b49d8902b693e6,

title = "Influence of Substrate Temperature on Structural, Optical, and Electrical Properties of ZnO Deposited by Plasma-EnhancedAtomic Layer Deposition",

author = "Julian Pilz",

year = "2018",

month = sep,

language = "Englisch (Amerika)",

note = "68th Annual Meeting of the Austrian Physical Society ; Conference date: 11-09-2018 Through 14-09-2018",

}