Influence of Substrate Temperature on Structural, Optical, and Electrical Properties of ZnO Deposited by Plasma-EnhancedAtomic Layer Deposition

Julian Pilz

Influence of Substrate Temperature on Structural, Optical, and Electrical Properties of ZnO Deposited by Plasma-EnhancedAtomic Layer Deposition

Publikation: Konferenzbeitrag › Abstract › Begutachtung

Originalsprache	Englisch (Amerika)
Publikationsstatus	Veröffentlicht - Sep. 2018
Extern publiziert	Ja
Veranstaltung	68th Annual Meeting of the Austrian Physical Society - Graz Dauer: 11 Sep. 2018 → 14 Sep. 2018

Konferenz

Konferenz	68th Annual Meeting of the Austrian Physical Society
Ort	Graz
Zeitraum	11/09/18 → 14/09/18

Dieses zitieren

@conference{794c0c5f67df49a586b49d8902b693e6,

title = "Influence of Substrate Temperature on Structural, Optical, and Electrical Properties of ZnO Deposited by Plasma-EnhancedAtomic Layer Deposition",

author = "Julian Pilz",

year = "2018",

month = sep,

language = "Englisch (Amerika)",

note = "68th Annual Meeting of the Austrian Physical Society ; Conference date: 11-09-2018 Through 14-09-2018",

}