Hybrid BAW/SAW AlN and AlScN thin film resonator

Vladimir Pashchenko, Ramin Matloub, Fazel Parsapour, Paul Muralt, Sylvain Ballandras, Ken Haffner

    Research output: Conference proceeding/Chapter in Book/Report/ › Conference Paper › peer-review

    Fingerprint

    Dive into the research topics of 'Hybrid BAW/SAW AlN and AlScN thin film resonator'. Together they form a unique fingerprint.

    Physics & Astronomy