High Frequency Optical Probe for BAW/SAW Devices

Hugo  Chambon; Pascal Nicolay; Thomas Moldaschl; Markus Zauner; Claude Humbert; Aoun AminAwan; Maximilian Schiek; Thomas Metzger; Ayech Benjeddou

High Frequency Optical Probe for BAW/SAW Devices

Hugo Chambon, Pascal Nicolay, Thomas Moldaschl, Markus Zauner, Claude Humbert, Aoun AminAwan, Maximilian Schiek, Thomas Metzger, Ayech Benjeddou

Research output: Contribution to journal › Article

Abstract

Optical probes are efficient tools to visualize surface displacements on top of SAW and BAW devices. The new generation of 5G RF Filters is expected to operate up to 6 GHz. The optical probes must therefore be able to detect surface vibrations up to at least this upper-limit frequency. In this paper we present characterization results obtained with an improved heterodyne interferometer, designed to detect high frequency surface vibrations up to 6 GHz. The tool was already successfully tested, on a reference SAW resonator driven at 900 MHz, a SAW transducer at 2.45 GHz, and a BAW resonator at 3.128 GHz.

Original language	English
Journal	2018 IEEE International Ultrasonics Symposium (IUS)
Publication status	Published - Oct 2018

Cite this

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title = "High Frequency Optical Probe for BAW/SAW Devices",

abstract = "Optical probes are efficient tools to visualize surface displacements on top of SAW and BAW devices. The new generation of 5G RF Filters is expected to operate up to 6 GHz. The optical probes must therefore be able to detect surface vibrations up to at least this upper-limit frequency. In this paper we present characterization results obtained with an improved heterodyne interferometer, designed to detect high frequency surface vibrations up to 6 GHz. The tool was already successfully tested, on a reference SAW resonator driven at 900 MHz, a SAW transducer at 2.45 GHz, and a BAW resonator at 3.128 GHz.",

author = "Hugo Chambon and Pascal Nicolay and Thomas Moldaschl and Markus Zauner and Claude Humbert and Aoun AminAwan and Maximilian Schiek and Thomas Metzger and Ayech Benjeddou",

year = "2018",

month = oct,

language = "English",

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TY - JOUR

T1 - High Frequency Optical Probe for BAW/SAW Devices

AU - Chambon, Hugo

AU - Nicolay, Pascal

AU - Moldaschl, Thomas

AU - Zauner, Markus

AU - Humbert, Claude

AU - AminAwan, Aoun

AU - Schiek, Maximilian

AU - Metzger, Thomas

AU - Benjeddou, Ayech

PY - 2018/10

Y1 - 2018/10

N2 - Optical probes are efficient tools to visualize surface displacements on top of SAW and BAW devices. The new generation of 5G RF Filters is expected to operate up to 6 GHz. The optical probes must therefore be able to detect surface vibrations up to at least this upper-limit frequency. In this paper we present characterization results obtained with an improved heterodyne interferometer, designed to detect high frequency surface vibrations up to 6 GHz. The tool was already successfully tested, on a reference SAW resonator driven at 900 MHz, a SAW transducer at 2.45 GHz, and a BAW resonator at 3.128 GHz.

AB - Optical probes are efficient tools to visualize surface displacements on top of SAW and BAW devices. The new generation of 5G RF Filters is expected to operate up to 6 GHz. The optical probes must therefore be able to detect surface vibrations up to at least this upper-limit frequency. In this paper we present characterization results obtained with an improved heterodyne interferometer, designed to detect high frequency surface vibrations up to 6 GHz. The tool was already successfully tested, on a reference SAW resonator driven at 900 MHz, a SAW transducer at 2.45 GHz, and a BAW resonator at 3.128 GHz.

M3 - Article

JO - 2018 IEEE International Ultrasonics Symposium (IUS)

JF - 2018 IEEE International Ultrasonics Symposium (IUS)

ER -

High Frequency Optical Probe for BAW/SAW Devices

Abstract

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