Optical probes are efficient tools to visualize surface displacements on top of SAW and BAW devices. The new generation of 5G RF Filters is expected to operate up to 6 GHz. The optical probes must therefore be able to detect surface vibrations up to at least this upper-limit frequency. In this paper we present characterization results obtained with an improved heterodyne interferometer, designed to detect high frequency surface vibrations up to 6 GHz. The tool was already successfully tested, on a reference SAW resonator driven at 900 MHz, a SAW transducer at 2.45 GHz, and a BAW resonator at 3.128 GHz.
|Journal||2018 IEEE International Ultrasonics Symposium (IUS)|
|Publication status||Published - Oct 2018|