Abstract
Optical probes are efficient tools to visualize surface displacements on top of SAW and BAW devices. The new generation of 5G RF Filters is expected to operate up to 6 GHz. The optical probes must therefore be able to detect surface vibrations up to at least this upper-limit frequency. In this paper we present characterization results obtained with an improved heterodyne interferometer, designed to detect high frequency surface vibrations up to 6 GHz. The tool was already successfully tested, on a reference SAW resonator driven at 900 MHz, a SAW transducer at 2.45 GHz, and a BAW resonator at 3.128 GHz.
Originalsprache | Englisch |
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Fachzeitschrift | 2018 IEEE International Ultrasonics Symposium (IUS) |
Publikationsstatus | Veröffentlicht - Okt. 2018 |