High-Aspect-Ratio Thin-Film Stiffening Structures Made of Atomic-Layer-Deposited Alumina and Its Application to a Scanning Micromirror

Tung Thanh Nguyen, Shuhei Saito, Takashi Sasaki, Daniel Greif, Maxwell Parsons, Steve Holmes, Hane Kazuhiro

Research output: Contribution to journal › Article › peer-review

Original language	English
Journal	Journal of Microelectromechanical Systems
Volume	32
Issue number	4
DOIs	https://doi.org/10.1109/JMEMS.2023.3275960
Publication status	Published - May 2023
Externally published	Yes

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title = "High-Aspect-Ratio Thin-Film Stiffening Structures Made of Atomic-Layer-Deposited Alumina and Its Application to a Scanning Micromirror",

author = "Nguyen, {Tung Thanh} and Shuhei Saito and Takashi Sasaki and Daniel Greif and Maxwell Parsons and Steve Holmes and Hane Kazuhiro",

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T1 - High-Aspect-Ratio Thin-Film Stiffening Structures Made of Atomic-Layer-Deposited Alumina and Its Application to a Scanning Micromirror

AU - Nguyen, Tung Thanh

AU - Saito, Shuhei

AU - Sasaki, Takashi

AU - Greif, Daniel

AU - Parsons, Maxwell

AU - Holmes, Steve

AU - Kazuhiro, Hane

PY - 2023/5

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JO - Journal of Microelectromechanical Systems

JF - Journal of Microelectromechanical Systems

IS - 4

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