High-Aspect-Ratio Thin-Film Stiffening Structures Made of Atomic-Layer-Deposited Alumina and Its Application to a Scanning Micromirror

Tung Thanh Nguyen, Shuhei Saito, Takashi Sasaki, Daniel Greif, Maxwell Parsons, Steve Holmes, Hane Kazuhiro

Publikation: Beitrag in Fachzeitschrift › Artikel › Begutachtung

Originalsprache	Englisch
Fachzeitschrift	Journal of Microelectromechanical Systems
Jahrgang	32
Ausgabenummer	4
DOIs	https://doi.org/10.1109/JMEMS.2023.3275960
Publikationsstatus	Veröffentlicht - Mai 2023
Extern publiziert	Ja

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author = "Nguyen, {Tung Thanh} and Shuhei Saito and Takashi Sasaki and Daniel Greif and Maxwell Parsons and Steve Holmes and Hane Kazuhiro",

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AU - Saito, Shuhei

AU - Sasaki, Takashi

AU - Greif, Daniel

AU - Parsons, Maxwell

AU - Holmes, Steve

AU - Kazuhiro, Hane

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