Fabrication Of Lithium Niobate Bulk Acoustic Resonator For 5G Filters

Annalisa De Pastina; Muhammad Faizan; Soumya Yandrapalli; Patrick J. Turner; Robert B. Hammond; Victor Plessky; Luis Guillermo Villanueva

doi:10.1109/TRANSDUCERS.2019.8808179

Fabrication Of Lithium Niobate Bulk Acoustic Resonator For 5G Filters

Annalisa De Pastina, Muhammad Faizan, Soumya Yandrapalli, Patrick J. Turner, Robert B. Hammond, Victor Plessky, Luis Guillermo Villanueva

Research output: Conference proceeding/Chapter in Book/Report/ › Conference Paper › peer-review

Abstract

This work presents the fabrication of a MEMS resonant device which addresses the need for high quality and miniaturized RF filters in the 3–6 GHz range for 5th generation (5G) mobile networks. The 4-mask fabrication process is based on the definition of interdigitated Aluminum (Al) electrodes on a suspended membrane of 400 nm-thick Z-cut lithium niobate (LiNbO3). Devices are fabricated with a yield of 70% and exhibit high electromechanical coupling (kt2) and quality factor (Q) up to 28% and 300, respectively, for frequencies around 5 GHz.

Original language	English
Title of host publication	IEEE 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII)
DOIs	https://doi.org/10.1109/TRANSDUCERS.2019.8808179
Publication status	Published - Jun 2019
Externally published	Yes
Event	2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII - Berlin, Germany Duration: 23 Jun 2019 → 27 Jun 2019

Conference

Conference	2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII
Abbreviated title	TRANSDUCERS and EUROSENSORS XXXIII
Country/Territory	Germany
City	Berlin
Period	23/06/19 → 27/06/19

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10.1109/TRANSDUCERS.2019.8808179

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De Pastina, A., Faizan, M., Yandrapalli, S., Turner, P. J., Hammond, R. B., Plessky, V., & Villanueva, L. G. (2019). Fabrication Of Lithium Niobate Bulk Acoustic Resonator For 5G Filters. In IEEE 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII) https://doi.org/10.1109/TRANSDUCERS.2019.8808179

@inproceedings{2c516581b23540e3bc4e65068ecedeae,

title = "Fabrication Of Lithium Niobate Bulk Acoustic Resonator For 5G Filters",

abstract = "This work presents the fabrication of a MEMS resonant device which addresses the need for high quality and miniaturized RF filters in the 3–6 GHz range for 5th generation (5G) mobile networks. The 4-mask fabrication process is based on the definition of interdigitated Aluminum (Al) electrodes on a suspended membrane of 400 nm-thick Z-cut lithium niobate (LiNbO3). Devices are fabricated with a yield of 70% and exhibit high electromechanical coupling (kt2) and quality factor (Q) up to 28% and 300, respectively, for frequencies around 5 GHz.",

author = "{De Pastina}, Annalisa and Muhammad Faizan and Soumya Yandrapalli and Turner, {Patrick J.} and Hammond, {Robert B.} and Victor Plessky and Villanueva, {Luis Guillermo}",

year = "2019",

month = jun,

doi = "10.1109/TRANSDUCERS.2019.8808179",

language = "English",

booktitle = "IEEE 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII)",

note = "2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII , TRANSDUCERS and EUROSENSORS XXXIII ; Conference date: 23-06-2019 Through 27-06-2019",

}

De Pastina, A, Faizan, M, Yandrapalli, S, Turner, PJ, Hammond, RB, Plessky, V & Villanueva, LG 2019, Fabrication Of Lithium Niobate Bulk Acoustic Resonator For 5G Filters. in IEEE 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII). 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII , Berlin, Germany, 23/06/19. https://doi.org/10.1109/TRANSDUCERS.2019.8808179

Fabrication Of Lithium Niobate Bulk Acoustic Resonator For 5G Filters. / De Pastina, Annalisa; Faizan, Muhammad; Yandrapalli, Soumya et al.
IEEE 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII). 2019.

Research output: Conference proceeding/Chapter in Book/Report/ › Conference Paper › peer-review

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T1 - Fabrication Of Lithium Niobate Bulk Acoustic Resonator For 5G Filters

AU - De Pastina, Annalisa

AU - Faizan, Muhammad

AU - Yandrapalli, Soumya

AU - Turner, Patrick J.

AU - Hammond, Robert B.

AU - Plessky, Victor

AU - Villanueva, Luis Guillermo

PY - 2019/6

Y1 - 2019/6

N2 - This work presents the fabrication of a MEMS resonant device which addresses the need for high quality and miniaturized RF filters in the 3–6 GHz range for 5th generation (5G) mobile networks. The 4-mask fabrication process is based on the definition of interdigitated Aluminum (Al) electrodes on a suspended membrane of 400 nm-thick Z-cut lithium niobate (LiNbO3). Devices are fabricated with a yield of 70% and exhibit high electromechanical coupling (kt2) and quality factor (Q) up to 28% and 300, respectively, for frequencies around 5 GHz.

AB - This work presents the fabrication of a MEMS resonant device which addresses the need for high quality and miniaturized RF filters in the 3–6 GHz range for 5th generation (5G) mobile networks. The 4-mask fabrication process is based on the definition of interdigitated Aluminum (Al) electrodes on a suspended membrane of 400 nm-thick Z-cut lithium niobate (LiNbO3). Devices are fabricated with a yield of 70% and exhibit high electromechanical coupling (kt2) and quality factor (Q) up to 28% and 300, respectively, for frequencies around 5 GHz.

U2 - 10.1109/TRANSDUCERS.2019.8808179

DO - 10.1109/TRANSDUCERS.2019.8808179

M3 - Conference Paper

BT - IEEE 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII)

T2 - 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII

Y2 - 23 June 2019 through 27 June 2019

ER -

Fabrication Of Lithium Niobate Bulk Acoustic Resonator For 5G Filters

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