Fabrication Of Lithium Niobate Bulk Acoustic Resonator For 5G Filters

Annalisa De Pastina; Muhammad Faizan; Soumya Yandrapalli; Patrick J. Turner; Robert B. Hammond; Victor Plessky; Luis Guillermo Villanueva

doi:10.1109/TRANSDUCERS.2019.8808179

Fabrication Of Lithium Niobate Bulk Acoustic Resonator For 5G Filters

Annalisa De Pastina, Muhammad Faizan, Soumya Yandrapalli, Patrick J. Turner, Robert B. Hammond, Victor Plessky, Luis Guillermo Villanueva

Publikation: Konferenzband/Beitrag in Buch/Bericht › Konferenzartikel › Begutachtung

Abstract

This work presents the fabrication of a MEMS resonant device which addresses the need for high quality and miniaturized RF filters in the 3–6 GHz range for 5th generation (5G) mobile networks. The 4-mask fabrication process is based on the definition of interdigitated Aluminum (Al) electrodes on a suspended membrane of 400 nm-thick Z-cut lithium niobate (LiNbO3). Devices are fabricated with a yield of 70% and exhibit high electromechanical coupling (kt2) and quality factor (Q) up to 28% and 300, respectively, for frequencies around 5 GHz.

Originalsprache	Englisch
Titel	IEEE 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII)
DOIs	https://doi.org/10.1109/TRANSDUCERS.2019.8808179
Publikationsstatus	Veröffentlicht - Juni 2019
Extern publiziert	Ja
Veranstaltung	2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII - Berlin, Deutschland Dauer: 23 Juni 2019 → 27 Juni 2019

Konferenz

Konferenz	2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII
Kurztitel	TRANSDUCERS and EUROSENSORS XXXIII
Land/Gebiet	Deutschland
Ort	Berlin
Zeitraum	23/06/19 → 27/06/19

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10.1109/TRANSDUCERS.2019.8808179

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De Pastina, A., Faizan, M., Yandrapalli, S., Turner, P. J., Hammond, R. B., Plessky, V., & Villanueva, L. G. (2019). Fabrication Of Lithium Niobate Bulk Acoustic Resonator For 5G Filters. in IEEE 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII) https://doi.org/10.1109/TRANSDUCERS.2019.8808179

@inproceedings{2c516581b23540e3bc4e65068ecedeae,

title = "Fabrication Of Lithium Niobate Bulk Acoustic Resonator For 5G Filters",

abstract = "This work presents the fabrication of a MEMS resonant device which addresses the need for high quality and miniaturized RF filters in the 3–6 GHz range for 5th generation (5G) mobile networks. The 4-mask fabrication process is based on the definition of interdigitated Aluminum (Al) electrodes on a suspended membrane of 400 nm-thick Z-cut lithium niobate (LiNbO3). Devices are fabricated with a yield of 70% and exhibit high electromechanical coupling (kt2) and quality factor (Q) up to 28% and 300, respectively, for frequencies around 5 GHz.",

author = "{De Pastina}, Annalisa and Muhammad Faizan and Soumya Yandrapalli and Turner, {Patrick J.} and Hammond, {Robert B.} and Victor Plessky and Villanueva, {Luis Guillermo}",

year = "2019",

month = jun,

doi = "10.1109/TRANSDUCERS.2019.8808179",

language = "English",

booktitle = "IEEE 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII)",

note = "2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII , TRANSDUCERS and EUROSENSORS XXXIII ; Conference date: 23-06-2019 Through 27-06-2019",

}

De Pastina, A, Faizan, M, Yandrapalli, S, Turner, PJ, Hammond, RB, Plessky, V & Villanueva, LG 2019, Fabrication Of Lithium Niobate Bulk Acoustic Resonator For 5G Filters. in IEEE 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII). 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII , Berlin, Deutschland, 23/06/19. https://doi.org/10.1109/TRANSDUCERS.2019.8808179

Fabrication Of Lithium Niobate Bulk Acoustic Resonator For 5G Filters. / De Pastina, Annalisa; Faizan, Muhammad; Yandrapalli, Soumya et al.
IEEE 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII). 2019.

Publikation: Konferenzband/Beitrag in Buch/Bericht › Konferenzartikel › Begutachtung

TY - GEN

T1 - Fabrication Of Lithium Niobate Bulk Acoustic Resonator For 5G Filters

AU - De Pastina, Annalisa

AU - Faizan, Muhammad

AU - Yandrapalli, Soumya

AU - Turner, Patrick J.

AU - Hammond, Robert B.

AU - Plessky, Victor

AU - Villanueva, Luis Guillermo

PY - 2019/6

Y1 - 2019/6

N2 - This work presents the fabrication of a MEMS resonant device which addresses the need for high quality and miniaturized RF filters in the 3–6 GHz range for 5th generation (5G) mobile networks. The 4-mask fabrication process is based on the definition of interdigitated Aluminum (Al) electrodes on a suspended membrane of 400 nm-thick Z-cut lithium niobate (LiNbO3). Devices are fabricated with a yield of 70% and exhibit high electromechanical coupling (kt2) and quality factor (Q) up to 28% and 300, respectively, for frequencies around 5 GHz.

AB - This work presents the fabrication of a MEMS resonant device which addresses the need for high quality and miniaturized RF filters in the 3–6 GHz range for 5th generation (5G) mobile networks. The 4-mask fabrication process is based on the definition of interdigitated Aluminum (Al) electrodes on a suspended membrane of 400 nm-thick Z-cut lithium niobate (LiNbO3). Devices are fabricated with a yield of 70% and exhibit high electromechanical coupling (kt2) and quality factor (Q) up to 28% and 300, respectively, for frequencies around 5 GHz.

U2 - 10.1109/TRANSDUCERS.2019.8808179

DO - 10.1109/TRANSDUCERS.2019.8808179

M3 - Conference Paper

BT - IEEE 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII)

T2 - 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII

Y2 - 23 June 2019 through 27 June 2019

ER -

Fabrication Of Lithium Niobate Bulk Acoustic Resonator For 5G Filters

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