Fabrication and evaluation of tunable submicron-thick monocrystalline silicon grating for integration on LSI circuit

T. Sasaki, S. Chernroj, H. Matsuura, K. Hane

Research output: Conference proceeding/Chapter in Book/Report/ › Conference Paper

Original language	Undefined/Unknown
Title of host publication	International Conference on Optical MEMS and Nanophotonics
DOIs	https://doi.org/10.1109/OMN.2015.7288876
Publication status	Published - 2015

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title = "Fabrication and evaluation of tunable submicron-thick monocrystalline silicon grating for integration on LSI circuit",

author = "T. Sasaki and S. Chernroj and H. Matsuura and K. Hane",

year = "2015",

doi = "10.1109/OMN.2015.7288876",

language = "undefiniert/unbekannt",

booktitle = "International Conference on Optical MEMS and Nanophotonics",

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TY - GEN

T1 - Fabrication and evaluation of tunable submicron-thick monocrystalline silicon grating for integration on LSI circuit

AU - Sasaki, T.

AU - Chernroj, S.

AU - Matsuura, H.

AU - Hane, K.

PY - 2015

Y1 - 2015

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U2 - 10.1109/OMN.2015.7288876

DO - 10.1109/OMN.2015.7288876

M3 - Konferenzartikel

BT - International Conference on Optical MEMS and Nanophotonics

ER -