Fabrication and evaluation of single-crystal-silicon tunable grating using polymer-based membrane transfer bonding process

S. Chernroj, H. Onuma, T. Suzuki, T. Sasaki, H. Matsuura, K. Hane

Research output: Contribution to journal › Article › peer-review

Original language	Undefined/Unknown
Journal	IEEJ Transactions on Sensors and Micromachines
DOIs	https://doi.org/10.1541/ieejsmas.135.361
Publication status	Published - 2015

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title = "Fabrication and evaluation of single-crystal-silicon tunable grating using polymer-based membrane transfer bonding process",

author = "S. Chernroj and H. Onuma and T. Suzuki and T. Sasaki and H. Matsuura and K. Hane",

year = "2015",

doi = "10.1541/ieejsmas.135.361",

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TY - JOUR

T1 - Fabrication and evaluation of single-crystal-silicon tunable grating using polymer-based membrane transfer bonding process

AU - Chernroj, S.

AU - Onuma, H.

AU - Suzuki, T.

AU - Sasaki, T.

AU - Matsuura, H.

AU - Hane, K.

PY - 2015

Y1 - 2015

UR - http://www.scopus.com/inward/record.url?eid=2-s2.0-84940656453&partnerID=MN8TOARS

U2 - 10.1541/ieejsmas.135.361

DO - 10.1541/ieejsmas.135.361

M3 - Artikel

SN - 1341-8939

JO - IEEJ Transactions on Sensors and Micromachines

JF - IEEJ Transactions on Sensors and Micromachines

ER -