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Ex-situ AlN seed layer for (0001)-textured Al0.84Sc0.16N thin films grown on SiO2 substrates
Fazel Parsapour, Vladimir Pashchenko, Stefan Mertin, Cosmin Sandu, Nicolas Kurz, Pascal Nicolay, Paul Muralt
Research output: Conference proceeding/Chapter in Book/Report/ › Conference Paper › peer-review