Enhanced silicon nitride etching in the presence of F atoms: Quantum chemistry simulation

Engineering & Materials Science

• Quantum chemistry 100%
• Silicon nitride 76%
• Etching 67%
• Atoms 65%
• Fluorine 28%
• Density functional theory 15%
• Dry etching 15%
• Semiconductor materials 9%
• Silicon 8%
• Industry 4%

Physics & Astronomy

• quantum chemistry 78%
• silicon nitrides 61%
• etching 47%
• atoms 31%
• simulation 23%
• fluorine 20%
• selectivity 19%
• chemistry 9%
• industries 8%
• density functional theory 8%
• silicon 5%

Chemical Compounds

• Quantum Chemistry 68%
• Nitride 60%
• Etching 56%
• Simulation 39%
• Semiconductor 7%
• Industry 7%
• Molecular Cluster 6%
• Surface 6%
• Density Functional Theory 6%
• Chemistry 6%