Electromechanical and process design of a 3 axis piezoelectric MEMS gyro in GaAs

A. Piot, B. Bourgeteau, O. Le Traon, I. Roland, N. Isac, R. Levy, P. Lavenus, J. Guerard, A. Bosseboeuf

Research output: Contribution to conference (No Proceedings) › Paper › peer-review

Original language	English
Pages	1-16
DOIs	https://doi.org/10.1109/InertialSensors.2015.7314260
Publication status	Published - Sept 2015
Event	2015 DGON Inertial Sensors and Systems Symposium (ISS) - Karlsruhe, Germany Duration: 22 Sept 2015 → 23 Sept 2015

Conference	2015 DGON Inertial Sensors and Systems Symposium (ISS)
Period	22/09/15 → 23/09/15

Access to Document

@conference{19188d027f334790826328b20f49f5f4,

title = "Electromechanical and process design of a 3 axis piezoelectric MEMS gyro in GaAs",

author = "A. Piot and B. Bourgeteau and {Le Traon}, O. and I. Roland and N. Isac and R. Levy and P. Lavenus and J. Guerard and A. Bosseboeuf",

year = "2015",

month = sep,

doi = "10.1109/InertialSensors.2015.7314260",

language = "English",

pages = "1--16",

note = "2015 DGON Inertial Sensors and Systems Symposium (ISS) ; Conference date: 22-09-2015 Through 23-09-2015",

}

TY - CONF

T1 - Electromechanical and process design of a 3 axis piezoelectric MEMS gyro in GaAs

AU - Piot, A.

AU - Bourgeteau, B.

AU - Le Traon, O.

AU - Roland, I.

AU - Isac, N.

AU - Levy, R.

AU - Lavenus, P.

AU - Guerard, J.

AU - Bosseboeuf, A.

PY - 2015/9

Y1 - 2015/9

U2 - 10.1109/InertialSensors.2015.7314260

DO - 10.1109/InertialSensors.2015.7314260

M3 - Paper

SP - 1

EP - 16

T2 - 2015 DGON Inertial Sensors and Systems Symposium (ISS)

Y2 - 22 September 2015 through 23 September 2015

ER -