Electromechanical and process design of a 3 axis piezoelectric MEMS gyro in GaAs

A. Piot, B. Bourgeteau, O. Le Traon, I. Roland, N. Isac, R. Levy, P. Lavenus, J. Guerard, A. Bosseboeuf

Publikation: Konferenzbeitrag › Papier › Begutachtung

Originalsprache	Englisch
Seiten	1-16
DOIs	https://doi.org/10.1109/InertialSensors.2015.7314260
Publikationsstatus	Veröffentlicht - Sep. 2015
Veranstaltung	2015 DGON Inertial Sensors and Systems Symposium (ISS) - Karlsruhe, Germany Dauer: 22 Sep. 2015 → 23 Sep. 2015

Konferenz	2015 DGON Inertial Sensors and Systems Symposium (ISS)
Zeitraum	22/09/15 → 23/09/15

Zugriff auf Dokument

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title = "Electromechanical and process design of a 3 axis piezoelectric MEMS gyro in GaAs",

author = "A. Piot and B. Bourgeteau and {Le Traon}, O. and I. Roland and N. Isac and R. Levy and P. Lavenus and J. Guerard and A. Bosseboeuf",

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AU - Piot, A.

AU - Bourgeteau, B.

AU - Le Traon, O.

AU - Roland, I.

AU - Isac, N.

AU - Levy, R.

AU - Lavenus, P.

AU - Guerard, J.

AU - Bosseboeuf, A.

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DO - 10.1109/InertialSensors.2015.7314260

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T2 - 2015 DGON Inertial Sensors and Systems Symposium (ISS)

Y2 - 22 September 2015 through 23 September 2015

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