Design, fabrication, and vacuum package process for high performance of 2D scanning MEMS micromirror

H.M. Chu, T. Sasaki, K. Hane

Research output: Conference proceeding/Chapter in Book/Report/ › Conference Paper

Original language	Undefined/Unknown
Title of host publication	2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11
DOIs	https://doi.org/10.1109/TRANSDUCERS.2011.5969713
Publication status	Published - 2011

Access to Document

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title = "Design, fabrication, and vacuum package process for high performance of 2D scanning MEMS micromirror",

author = "H.M. Chu and T. Sasaki and K. Hane",

year = "2011",

doi = "10.1109/TRANSDUCERS.2011.5969713",

language = "undefiniert/unbekannt",

booktitle = "2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11",

}

TY - GEN

T1 - Design, fabrication, and vacuum package process for high performance of 2D scanning MEMS micromirror

AU - Chu, H.M.

AU - Sasaki, T.

AU - Hane, K.

PY - 2011

Y1 - 2011

UR - http://www.scopus.com/inward/record.url?eid=2-s2.0-80052128272&partnerID=MN8TOARS

U2 - 10.1109/TRANSDUCERS.2011.5969713

DO - 10.1109/TRANSDUCERS.2011.5969713

M3 - Konferenzartikel

BT - 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11

ER -