Design, fabrication, and vacuum package process for high performance of 2D scanning MEMS micromirror

H.M. Chu, T. Sasaki, K. Hane

Publikation: Konferenzband/Beitrag in Buch/Bericht › Konferenzartikel

Originalsprache	undefiniert/unbekannt
Titel	2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11
DOIs	https://doi.org/10.1109/TRANSDUCERS.2011.5969713
Publikationsstatus	Veröffentlicht - 2011

Zugriff auf Dokument

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title = "Design, fabrication, and vacuum package process for high performance of 2D scanning MEMS micromirror",

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year = "2011",

doi = "10.1109/TRANSDUCERS.2011.5969713",

language = "undefiniert/unbekannt",

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AU - Chu, H.M.

AU - Sasaki, T.

AU - Hane, K.

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U2 - 10.1109/TRANSDUCERS.2011.5969713

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BT - 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11

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