Design, fabrication, and optical characteristics of freestanding GaN waveguides on silicon substrate

T. Sekiya, T. Sasaki, K. Hane

Research output: Contribution to journal › Article › peer-review

Original language	Undefined/Unknown
Journal	Journal of Vacuum Science and Technology B: Nanotechnology and Microelectronics
DOIs	https://doi.org/10.1116/1.4917487
Publication status	Published - 2015

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TY - JOUR

T1 - Design, fabrication, and optical characteristics of freestanding GaN waveguides on silicon substrate

AU - Sekiya, T.

AU - Sasaki, T.

AU - Hane, K.

PY - 2015

Y1 - 2015

UR - http://www.scopus.com/inward/record.url?eid=2-s2.0-84928494411&partnerID=MN8TOARS

U2 - 10.1116/1.4917487

DO - 10.1116/1.4917487

M3 - Artikel

SN - 2166-2746

JO - Journal of Vacuum Science and Technology B: Nanotechnology and Microelectronics

JF - Journal of Vacuum Science and Technology B: Nanotechnology and Microelectronics

ER -