Design and fabrication of freestanding pitch-variable blazed gratings on a silicon-on-insulator wafer

Y. Wang, Y. Kanamori, T. Sasaki, K. Hane

Research output: Contribution to journal › Article › peer-review

Original language	Undefined/Unknown
Journal	Journal of Micromechanics and Microengineering
DOIs	https://doi.org/10.1088/0960-1317/19/2/025019
Publication status	Published - 2009

Access to Document

TY - JOUR

T1 - Design and fabrication of freestanding pitch-variable blazed gratings on a silicon-on-insulator wafer

AU - Wang, Y.

AU - Kanamori, Y.

AU - Sasaki, T.

AU - Hane, K.

PY - 2009

Y1 - 2009

UR - http://www.scopus.com/inward/record.url?eid=2-s2.0-61849139116&partnerID=MN8TOARS

U2 - 10.1088/0960-1317/19/2/025019

DO - 10.1088/0960-1317/19/2/025019

M3 - Artikel

SN - 1361-6439

JO - Journal of Micromechanics and Microengineering

JF - Journal of Micromechanics and Microengineering

ER -