Deformation of varifocal mirror with narrow frame by SOI wafer residual stress

Research output: Contribution to journal › Article › peer-review

Original language	Undefined/Unknown
Journal	Electronics and Communications in Japan
DOIs	https://doi.org/10.1002/ecj.11381
Publication status	Published - 2012

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TY - JOUR

T1 - Deformation of varifocal mirror with narrow frame by SOI wafer residual stress

AU - Sasaki, T.

AU - Hane, K.

PY - 2012

Y1 - 2012

UR - http://www.scopus.com/inward/record.url?eid=2-s2.0-84864490007&partnerID=MN8TOARS

U2 - 10.1002/ecj.11381

DO - 10.1002/ecj.11381

M3 - Artikel

SN - 1942-9533

JO - Electronics and Communications in Japan

JF - Electronics and Communications in Japan

ER -