Comb-drive tracking and focusing lens actuators integrated on a silicon-on-insulator wafer

P. Li, T. Sasaki, L.F. Pan, K. Hane

Research output: Contribution to journal › Article › peer-review

Access to Document

TY - JOUR

T1 - Comb-drive tracking and focusing lens actuators integrated on a silicon-on-insulator wafer

AU - Li, P.

AU - Sasaki, T.

AU - Pan, L.F.

AU - Hane, K.

PY - 2012

Y1 - 2012

UR - http://www.scopus.com/inward/record.url?eid=2-s2.0-84855454003&partnerID=MN8TOARS

U2 - 10.1364/OE.20.000627

DO - 10.1364/OE.20.000627

M3 - Artikel

SN - 1094-4087

JO - Optics Express

JF - Optics Express

ER -