Original language | Undefined/Unknown |
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Title of host publication | 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11 |
DOIs | |
Publication status | Published - 2011 |
Comb-drive III-nitride micro mirror fabricated by fast atom beam etching
Y.J. Wang, T. Sasaki, T. Wu, F.R. Hu, K. Hane
Research output: Conference proceeding/Chapter in Book/Report/ › Conference Paper