Comb-drive III-nitride micro mirror fabricated by fast atom beam etching

Y.J. Wang, T. Sasaki, T. Wu, F.R. Hu, K. Hane

Publikation: Konferenzband/Beitrag in Buch/Bericht › Konferenzartikel

Originalsprache	undefiniert/unbekannt
Titel	2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11
DOIs	https://doi.org/10.1109/TRANSDUCERS.2011.5969494
Publikationsstatus	Veröffentlicht - 2011

Zugriff auf Dokument

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title = "Comb-drive III-nitride micro mirror fabricated by fast atom beam etching",

author = "Y.J. Wang and T. Sasaki and T. Wu and F.R. Hu and K. Hane",

year = "2011",

doi = "10.1109/TRANSDUCERS.2011.5969494",

language = "undefiniert/unbekannt",

booktitle = "2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11",

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T1 - Comb-drive III-nitride micro mirror fabricated by fast atom beam etching

AU - Wang, Y.J.

AU - Sasaki, T.

AU - Wu, T.

AU - Hu, F.R.

AU - Hane, K.

PY - 2011

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DO - 10.1109/TRANSDUCERS.2011.5969494

M3 - Konferenzartikel

BT - 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11

ER -