Comb-drive GaN micro-mirror on a GaN-on-silicon platform

Y. Wang, T. Sasaki, T. Wu, F. Hu, K. Hane

Research output: Contribution to journal › Article › peer-review

Original language	Undefined/Unknown
Journal	Journal of Micromechanics and Microengineering
DOIs	https://doi.org/10.1088/0960-1317/21/3/035012
Publication status	Published - 2011

Access to Document

TY - JOUR

T1 - Comb-drive GaN micro-mirror on a GaN-on-silicon platform

AU - Wang, Y.

AU - Sasaki, T.

AU - Wu, T.

AU - Hu, F.

AU - Hane, K.

PY - 2011

Y1 - 2011

UR - http://www.scopus.com/inward/record.url?eid=2-s2.0-79952653680&partnerID=MN8TOARS

U2 - 10.1088/0960-1317/21/3/035012

DO - 10.1088/0960-1317/21/3/035012

M3 - Artikel

SN - 1361-6439

JO - Journal of Micromechanics and Microengineering

JF - Journal of Micromechanics and Microengineering

ER -