An optically flat micromirror using a stretched membrane with crystallization-induced stress

M. Sasaki, T. Sasaki, K. Hane, H. Miura

Research output: Contribution to journal › Article › peer-review

Original language	Undefined/Unknown
Journal	Journal of Optics A: Pure and Applied Optics
DOIs	https://doi.org/10.1088/1464-4258/10/4/044004
Publication status	Published - 2008

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title = "An optically flat micromirror using a stretched membrane with crystallization-induced stress",

author = "M. Sasaki and T. Sasaki and K. Hane and H. Miura",

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T1 - An optically flat micromirror using a stretched membrane with crystallization-induced stress

AU - Sasaki, M.

AU - Sasaki, T.

AU - Hane, K.

AU - Miura, H.

PY - 2008

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M3 - Artikel

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JO - Journal of Optics A: Pure and Applied Optics

JF - Journal of Optics A: Pure and Applied Optics

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