An optically flat micromirror using a stretched membrane with crystallization-induced stress

M. Sasaki, T. Sasaki, K. Hane, H. Miura

Publikation: Beitrag in Fachzeitschrift › Artikel › Begutachtung

Originalsprache	undefiniert/unbekannt
Fachzeitschrift	Journal of Optics A: Pure and Applied Optics
DOIs	https://doi.org/10.1088/1464-4258/10/4/044004
Publikationsstatus	Veröffentlicht - 2008

Zugriff auf Dokument

@article{58a263a3f47a4e31b566ef2229fd87b7,

title = "An optically flat micromirror using a stretched membrane with crystallization-induced stress",

author = "M. Sasaki and T. Sasaki and K. Hane and H. Miura",

year = "2008",

doi = "10.1088/1464-4258/10/4/044004",

language = "undefiniert/unbekannt",

journal = "Journal of Optics A: Pure and Applied Optics",

issn = "1741-3567",

publisher = "Institute of Physics Publishing",

}

TY - JOUR

T1 - An optically flat micromirror using a stretched membrane with crystallization-induced stress

AU - Sasaki, M.

AU - Sasaki, T.

AU - Hane, K.

AU - Miura, H.

PY - 2008

Y1 - 2008

UR - http://www.scopus.com/inward/record.url?eid=2-s2.0-43049096441&partnerID=MN8TOARS

U2 - 10.1088/1464-4258/10/4/044004

DO - 10.1088/1464-4258/10/4/044004

M3 - Artikel

SN - 1741-3567

JO - Journal of Optics A: Pure and Applied Optics

JF - Journal of Optics A: Pure and Applied Optics

ER -