| Original language | English |
|---|---|
| Publication status | Published - 2022 |
Al(Sc)N on insulator platform for photonic MEMS
Jasmin Spettel, Marco Liffredo, Hernán Furci, Florian Dubois, Mohssen Moridi, Thang Duy Dao, Luis Guillermo Villanueva
Research output: Contribution to conference (No Proceedings) › Poster