Fingerprint
Dive into the research topics of 'AlScN and AlN – based hybrid BAW/SAW resonator with enhanced Q-factor and electromechanical coupling'. Together they form a unique fingerprint.- Sort by
- Weight
- Alphabetically
Vladimir Pashchenko, Fazel Parsapour, Hanspeter Zinn, Paul Muralt
Research output: Contribution to conference (No Proceedings) › Abstract › peer-review