@inbook{2b252e717fcc44bb82b389e2df28d815,
title = "A novel piezoresistive sensitive structure for micromachined high-pressure sensors",
abstract = "A novel piezoresistive sensitive structure for micromachined high-pressure sensors is proposed. This structure employs several small cavities in a silicon bulk. When high pressure applied on all faces of the bulk, stress emerges between two cavities. The calculation for the variation of the resistance caused by stress in three-dimensional (3D) structure was discussed. According to 3D piezoresistive effect, the performance of the sensitivity and nonlinearity affected by the dimensions of cavity structure had been clarified. The simulation results show the optimized position for the resistance is in lower region. This sensitive structure is suitable for micromachined high-pressure sensors and the performance study set a guideline for designing micromachined high-pressure sensors with multi-cavities working in different range.",
keywords = "3D piezoresistive effect, micromachined high pressure, piezoresistive sensitive structure, resistance arrangement",
author = "Xin Guo and Rahman Hebibul and Zhuangde Jiang and Libo Zhao and Tingzhong Xu and Zhiming Zhao and Zhikang Li and Yu Xu and Wendi Gao",
year = "2017",
month = aug,
day = "25",
doi = "10.1109/NEMS.2017.8017123",
language = "English",
isbn = "9781509030590",
series = "2017 IEEE 12th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2017",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
pages = "728--731",
booktitle = "2017 IEEE 12th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2017",
address = "United States",
}