A novel piezoresistive sensitive structure for micromachined high-pressure sensors

Xin Guo, Rahman Hebibul, Zhuangde Jiang, Libo Zhao, Tingzhong Xu, Zhiming Zhao, Zhikang Li, Yu Xu, Wendi Gao

    Research output: Conference proceeding/Chapter in Book/Report/ › Chapter › peer-review

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    Physics & Astronomy