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A Novel Peninsula-island Structure for Sensing Ultra-low Pressure Based on Dry-wet Combination Etching Process
Mimi Huang, Libo Zhao, Tingzhong Xu, Chen Jia, Ping Yang, Zhikang Li, Hongyan Wang, Yongshun Wu, Zhuangde Jiang
Research output: Conference proceeding/Chapter in Book/Report/ › Chapter › peer-review