A LIGHTWEIGHT MICROMIRROR MADE OF ATOMIC-LAYER-DEPOSITION ALUMINA AND SILICON WITH A HIGH ASPECT-RATIO STIFFENING STRUCTURE

Tung Thanh  Nguyen; Takashi Sasaki; Daniel Greif; Katie Smyth; Sergey Lamansky; Hane Kazuhiro

A LIGHTWEIGHT MICROMIRROR MADE OF ATOMIC-LAYER-DEPOSITION ALUMINA AND SILICON WITH A HIGH ASPECT-RATIO STIFFENING STRUCTURE

Tung Thanh Nguyen, Takashi Sasaki, Daniel Greif, Katie Smyth, Sergey Lamansky, Hane Kazuhiro

Research output: Conference proceeding/Chapter in Book/Report/ › Conference Paper

Original language	English
Title of host publication	A LIGHTWEIGHT MICROMIRROR MADE OF ATOMIC-LAYER-DEPOSITION ALUMINA AND SILICON WITH A HIGH ASPECT-RATIO STIFFENING STRUCTURE
Pages	T4P.056
Publication status	Published - Jun 2023
Externally published	Yes
Event	Transducers 2023 (The 22nd International Conference on Solid-State Sensors, Actuators and Microsystems) - Kyoto International Conference Center, Kyoto, Japan Duration: 25 Jun 2023 → 29 Jun 2023 https://www.transducers2023.org/

Conference

Conference	Transducers 2023 (The 22nd International Conference on Solid-State Sensors, Actuators and Microsystems)
Abbreviated title	Transducers 2023
Country/Territory	Japan
City	Kyoto
Period	25/06/23 → 29/06/23
Internet address	https://www.transducers2023.org/

Cite this

@inproceedings{e1103b0316b94987a601aeef0a38929c,

title = "A LIGHTWEIGHT MICROMIRROR MADE OF ATOMIC-LAYER-DEPOSITION ALUMINA AND SILICON WITH A HIGH ASPECT-RATIO STIFFENING STRUCTURE",

author = "Nguyen, {Tung Thanh} and Takashi Sasaki and Daniel Greif and Katie Smyth and Sergey Lamansky and Hane Kazuhiro",

year = "2023",

month = jun,

language = "English",

pages = "T4P.056",

booktitle = "A LIGHTWEIGHT MICROMIRROR MADE OF ATOMIC-LAYER-DEPOSITION ALUMINA AND SILICON WITH A HIGH ASPECT-RATIO STIFFENING STRUCTURE",

note = "Transducers 2023 (The 22nd International Conference on Solid-State Sensors, Actuators and Microsystems), Transducers 2023 ; Conference date: 25-06-2023 Through 29-06-2023",

url = "https://www.transducers2023.org/",

}

Nguyen, TT, Sasaki, T, Greif, D, Smyth, K, Lamansky, S & Kazuhiro, H 2023, A LIGHTWEIGHT MICROMIRROR MADE OF ATOMIC-LAYER-DEPOSITION ALUMINA AND SILICON WITH A HIGH ASPECT-RATIO STIFFENING STRUCTURE. in A LIGHTWEIGHT MICROMIRROR MADE OF ATOMIC-LAYER-DEPOSITION ALUMINA AND SILICON WITH A HIGH ASPECT-RATIO STIFFENING STRUCTURE. pp. T4P.056, Transducers 2023 (The 22nd International Conference on Solid-State Sensors, Actuators and Microsystems), Kyoto, Japan, 25/06/23.

A LIGHTWEIGHT MICROMIRROR MADE OF ATOMIC-LAYER-DEPOSITION ALUMINA AND SILICON WITH A HIGH ASPECT-RATIO STIFFENING STRUCTURE. / Nguyen, Tung Thanh ; Sasaki, Takashi; Greif, Daniel et al.
A LIGHTWEIGHT MICROMIRROR MADE OF ATOMIC-LAYER-DEPOSITION ALUMINA AND SILICON WITH A HIGH ASPECT-RATIO STIFFENING STRUCTURE. 2023. p. T4P.056.

Research output: Conference proceeding/Chapter in Book/Report/ › Conference Paper

TY - GEN

T1 - A LIGHTWEIGHT MICROMIRROR MADE OF ATOMIC-LAYER-DEPOSITION ALUMINA AND SILICON WITH A HIGH ASPECT-RATIO STIFFENING STRUCTURE

AU - Nguyen, Tung Thanh

AU - Sasaki, Takashi

AU - Greif, Daniel

AU - Smyth, Katie

AU - Lamansky, Sergey

AU - Kazuhiro, Hane

PY - 2023/6

Y1 - 2023/6

M3 - Conference Paper

SP - T4P.056

BT - A LIGHTWEIGHT MICROMIRROR MADE OF ATOMIC-LAYER-DEPOSITION ALUMINA AND SILICON WITH A HIGH ASPECT-RATIO STIFFENING STRUCTURE

T2 - Transducers 2023 (The 22nd International Conference on Solid-State Sensors, Actuators and Microsystems)

Y2 - 25 June 2023 through 29 June 2023

ER -