Originalsprache | Englisch |
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Titel | A LIGHTWEIGHT MICROMIRROR MADE OF ATOMIC-LAYER-DEPOSITION ALUMINA AND SILICON WITH A HIGH ASPECT-RATIO STIFFENING STRUCTURE |
Seiten | T4P.056 |
Publikationsstatus | Veröffentlicht - Juni 2023 |
Extern publiziert | Ja |
Veranstaltung | Transducers 2023 (The 22nd International Conference on Solid-State Sensors, Actuators and Microsystems) - Kyoto International Conference Center, Kyoto, Japan Dauer: 25 Juni 2023 → 29 Juni 2023 https://www.transducers2023.org/ |
Konferenz
Konferenz | Transducers 2023 (The 22nd International Conference on Solid-State Sensors, Actuators and Microsystems) |
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Kurztitel | Transducers 2023 |
Land/Gebiet | Japan |
Ort | Kyoto |
Zeitraum | 25/06/23 → 29/06/23 |
Internetadresse |