A LIGHTWEIGHT MICROMIRROR MADE OF ATOMIC-LAYER-DEPOSITION ALUMINA AND SILICON WITH A HIGH ASPECT-RATIO STIFFENING STRUCTURE

Tung Thanh Nguyen, Takashi Sasaki, Daniel Greif, Katie Smyth, Sergey Lamansky, Hane Kazuhiro

Publikation: Konferenzband/Beitrag in Buch/BerichtKonferenzartikel

OriginalspracheEnglisch
TitelA LIGHTWEIGHT MICROMIRROR MADE OF ATOMIC-LAYER-DEPOSITION ALUMINA AND SILICON WITH A HIGH ASPECT-RATIO STIFFENING STRUCTURE
SeitenT4P.056
PublikationsstatusVeröffentlicht - Juni 2023
Extern publiziertJa
VeranstaltungTransducers 2023 (The 22nd International Conference on Solid-State Sensors, Actuators and Microsystems) - Kyoto International Conference Center, Kyoto, Japan
Dauer: 25 Juni 202329 Juni 2023
https://www.transducers2023.org/

Konferenz

KonferenzTransducers 2023 (The 22nd International Conference on Solid-State Sensors, Actuators and Microsystems)
KurztitelTransducers 2023
Land/GebietJapan
OrtKyoto
Zeitraum25/06/2329/06/23
Internetadresse

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