A continuous single-crystal-silicon membrane deformable mirror using bimorph spring

T. Wu, T. Sasaki, M. Akiyama, K. Hane

Research output: Conference proceeding/Chapter in Book/Report/ › Conference Paper

Original language	Undefined/Unknown
Title of host publication	Proceedings of SPIE - The International Society for Optical Engineering
DOIs	https://doi.org/10.1117/12.2002785
Publication status	Published - 2013

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title = "A continuous single-crystal-silicon membrane deformable mirror using bimorph spring",

author = "T. Wu and T. Sasaki and M. Akiyama and K. Hane",

year = "2013",

doi = "10.1117/12.2002785",

language = "undefiniert/unbekannt",

booktitle = "Proceedings of SPIE - The International Society for Optical Engineering",

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TY - GEN

T1 - A continuous single-crystal-silicon membrane deformable mirror using bimorph spring

AU - Wu, T.

AU - Sasaki, T.

AU - Akiyama, M.

AU - Hane, K.

PY - 2013

Y1 - 2013

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U2 - 10.1117/12.2002785

DO - 10.1117/12.2002785

M3 - Konferenzartikel

BT - Proceedings of SPIE - The International Society for Optical Engineering

ER -