A bossed diaphragm piezoresistive pressure sensor with a peninsula-island structure for the ultra-low-pressure range with high sensitivity

Libo Zhao, Tingzhong Xu, Rahman Hebibul, Zhuangde Jiang, Jianjun Ding, Niancai Peng, Xin Guo, Yu Xu, Hongyan Wang, Yulong Zhao

    Research output: Contribution to journal › Article › peer-review

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    Engineering & Materials Science