TY - JOUR
T1 - A bossed diaphragm piezoresistive pressure sensor with a peninsula-island structure for the ultra-low-pressure range with high sensitivity
AU - Zhao, Libo
AU - Xu, Tingzhong
AU - Hebibul, Rahman
AU - Jiang, Zhuangde
AU - Ding, Jianjun
AU - Peng, Niancai
AU - Guo, Xin
AU - Xu, Yu
AU - Wang, Hongyan
AU - Zhao, Yulong
PY - 2016/10/25
Y1 - 2016/10/25
N2 - A sensor chip with a bossed diaphragm combined with a peninsula-island structure was developed for a piezoresistive pressure sensor. By introducing a stiffness mutation above the gap position between the peninsula and island structures, the strain energy of the proposed diaphragm was mainly concentrated upon the gap position, which remarkably increased the sensitivity of the sensor chip. A beam-diaphragm coupled model and an optimization method for the novel sensor chip were also developed, which gave guidelines for optimizing the sensor chip structure. Finally, a sensor chip with the bossed diaphragm combined with peninsula-island structure was fabricated and tested. The experimental results showed that the proposed sensor chip was able to measure ultra-low pressure within 500 Pa with high sensitivity.
AB - A sensor chip with a bossed diaphragm combined with a peninsula-island structure was developed for a piezoresistive pressure sensor. By introducing a stiffness mutation above the gap position between the peninsula and island structures, the strain energy of the proposed diaphragm was mainly concentrated upon the gap position, which remarkably increased the sensitivity of the sensor chip. A beam-diaphragm coupled model and an optimization method for the novel sensor chip were also developed, which gave guidelines for optimizing the sensor chip structure. Finally, a sensor chip with the bossed diaphragm combined with peninsula-island structure was fabricated and tested. The experimental results showed that the proposed sensor chip was able to measure ultra-low pressure within 500 Pa with high sensitivity.
KW - analytic model
KW - high sensitivity
KW - pressure sensor
KW - stress concentration region
KW - ultra-low pressure
UR - https://www.mendeley.com/catalogue/0531b47d-ab78-3f79-bf29-01fbaf0f8781/
U2 - 10.1088/0957-0233/27/12/124012
DO - 10.1088/0957-0233/27/12/124012
M3 - Article
SN - 1361-6501
VL - 27
JO - Measurement Science and Technology
JF - Measurement Science and Technology
IS - 12
ER -