50μm gap 8×8 pixels deformable mirror fabricated by membrane transfer process

T. Wu, T. Sasaki, M. Akiyama, K. Hane

Research output: Conference proceeding/Chapter in Book/Report/ › Conference Paper

Original language	Undefined/Unknown
Title of host publication	International Conference on Optical MEMS and Nanophotonics
DOIs	https://doi.org/10.1109/OMN.2014.6924577
Publication status	Published - 2014

Access to Document

@inproceedings{86083612b61e46d79b85404c9a1208fc,

title = "50μm gap 8×8 pixels deformable mirror fabricated by membrane transfer process",

author = "T. Wu and T. Sasaki and M. Akiyama and K. Hane",

year = "2014",

doi = "10.1109/OMN.2014.6924577",

language = "undefiniert/unbekannt",

booktitle = "International Conference on Optical MEMS and Nanophotonics",

}

TY - GEN

T1 - 50μm gap 8×8 pixels deformable mirror fabricated by membrane transfer process

AU - Wu, T.

AU - Sasaki, T.

AU - Akiyama, M.

AU - Hane, K.

PY - 2014

Y1 - 2014

UR - http://www.scopus.com/inward/record.url?eid=2-s2.0-84908021111&partnerID=MN8TOARS

U2 - 10.1109/OMN.2014.6924577

DO - 10.1109/OMN.2014.6924577

M3 - Konferenzartikel

BT - International Conference on Optical MEMS and Nanophotonics

ER -