一种梁槽结合台阶式岛膜微压传感器芯片及制备方法

Translated title of the contribution: A kind of beam groove combines step island film micro-pressure sensor chip and preparation method

Zhuangde Jiang (Inventor), Tingzhong Xu (Inventor), Libo Zhao (Inventor), Niancai Peng (Inventor), Jiuhong Wang (Inventor), Xin Guo (Inventor), Yu Xu (Inventor), Guoying Yuan (Inventor), Yulong Zhao (Inventor)

    Research output: Patent

    Fingerprint

    Dive into the research topics of 'A kind of beam groove combines step island film micro-pressure sensor chip and preparation method'. Together they form a unique fingerprint.

    Engineering & Materials Science