一种支撑梁式mems流体热导率和热扩散系数传感器及其制备和测试方法

Translated title of the contribution: One kind support beam type MEMS fluids thermal conductivity and thermal diffusion coefficient sensor and its preparation and method of testing

Libo Zhao (Inventor), Xiangxiang Huang (Inventor), Yong Xia (Inventor), Tingzhong Xu (Inventor), Xin Guo (Inventor), Yunyun Luo (Inventor)

    Research output: Patent

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    Physics & Astronomy