Многосеточные энергоанализаторы задерживающего потенциала для измерения функции распределения ионов по энергиям из плазмы высокочастотного емкостного разряда

Consideration is given to numerical and experimental studies of the effect of energy analyzer design
elements on the resolving power of the device for measurements of energy distribution function of
ions from capacitively coupled rf discharge. It has been demonstrated using three-dimensional numerical simulations of charged particles movement inside the energy analyzer that the instrument
function of the device strongly depends on the mutual orientation of the grids cells. It has been
shown that the broadening of charged particles energy spectrum in energy analyzer mostly depends
on the magnitude of the potential sagging inside cells of the analyzing grid. Formulas for quantitative estimate of the broadening of charged particles energy spectrum for retarding field energy analyzers using meshes with square or hexagonal cells are given