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Исследование воздействия плазмы SF6 на поверхность НЕМТ-структур на основе GaN
Translated title of the contribution
:
Study of SF6 plasma treatment of GaN-НЕМТ structures
Andrianov Nikolai
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Physics & Astronomy
caps
100%
polarity
88%
high electron mobility transistors
48%
electrical faults
46%
valence
34%
metals
24%