анализатор потока и энергии заряженных частиц: анализатор потока и энергии заряженных частиц

Translated title of the contribution: particle flux and energy analyzer: particle flux and energy analyzer

Research output: Patent

Abstract

miniaturized RFEA sensor for electron and ion energy spectra measurements

Translated title of the contribution	particle flux and energy analyzer: particle flux and energy analyzer
Original language	Russian
Patent number	119519
Filing date	20/12/12
Publication status	Published - 2012

@misc{5d8ac5604230404ab49bb16ac16f91c6,

title = "анализатор потока и энергии заряженных частиц: анализатор потока и энергии заряженных частиц ",

abstract = "miniaturized RFEA sensor for electron and ion energy spectra measurements",

keywords = "RFEA, Energy analyzer",

author = "Nikolai Andrianov",

note = "Miniaturized retarding field energy analyzer with improved mesh transparency is presented; 119519",

year = "2012",

language = "Russisch",

type = "Patent",

}

TY - PAT

T1 - анализатор потока и энергии заряженных частиц

T2 - анализатор потока и энергии заряженных частиц

AU - Andrianov, Nikolai

N1 - Miniaturized retarding field energy analyzer with improved mesh transparency is presented

PY - 2012

Y1 - 2012

N2 - miniaturized RFEA sensor for electron and ion energy spectra measurements

AB - miniaturized RFEA sensor for electron and ion energy spectra measurements

KW - RFEA

KW - Energy analyzer

UR - https://poleznayamodel.ru/byauthors/65348/

M3 - Patent

M1 - 119519

Y2 - 2012/12/20

ER -