Physics & Astronomy
acoustics
38%
atomic force microscopy
25%
augmentation
12%
chemical bonds
11%
CMOS
14%
diffraction
10%
electronics
15%
ellipsometry
59%
engineering
44%
fabrication
12%
filters
12%
flattening
23%
gradients
17%
hafnium
74%
high resolution
12%
impurities
13%
interactions
24%
isolation
19%
low pressure
16%
microelectromechanical systems
42%
microstructure
74%
modulus of elasticity
16%
nanoindentation
20%
nitrides
94%
optical properties
13%
oxides
29%
oxygen
12%
oxynitrides
12%
performance
33%
permittivity
14%
phonons
13%
photonics
27%
platforms
14%
resonators
30%
scanning electron microscopy
22%
seeds
74%
silicon nitrides
59%
silicon oxides
63%
softening
19%
solid solutions
49%
sputtering
28%
tensile stress
10%
textures
15%
thin films
100%
transducers
21%
transmission electron microscopy
17%
trends
15%
vapor deposition
46%
wurtzite
22%
yttrium
38%
Engineering & Materials Science
Acoustic waves
47%
Acoustics
24%
Atomic force microscopy
38%
Carrier concentration
42%
Elastic moduli
25%
Fabrication
22%
Film growth
48%
Impurities
29%
Microstructure
40%
Monitoring
17%
Multilayers
29%
Nanoindentation
36%
Nitrides
36%
Oxygen
24%
Permittivity
30%
Resonators
56%
Scanning electron microscopy
23%
Seed
31%
Substrates
21%
Thin films
57%
Transducers
28%
Transmission electron microscopy
31%
X ray diffraction
29%
Yttrium
43%